Banner NWv 1200x200

nanoPHAB® is the novel pure-play foundry offering specialized foundry services for the development of research and commercial micro- and nanophotonics products mainly based on III-V,Si and Nitrides nanotechnologies.

Using the facilities of NanoLab@TU/e, our services consist of the micro- and nano-fabrication of integrated and scalable photonic components and circuits based on III-V heterostructures, and include:


Process design and feasibility analysis based on the customer’s specifications    


Epitaxial growth of nanostructures as III-V heterostructures (mainly based on InP and GaAs) and nanowires by Metal Organic Vapor Phase Epitaxy (MOVPE) and Molecular Beam Epitaxy (MBE)     


Nanofabrication processing including  sputtering, plasma-enhanced chemical vapor deposition (PECVD), E-beam lithography, nanoimprint lithography, UV and DUV lithography, reactive ion etching (RIE), inductively coupled plasma (ICP) etching, thermal and E-beam evaporation of metals for ohmic contacts, bonding to silicon and wet chemical etching (see a list of our main equipment)    


We additionally offer access to a number of key R&D nanophotonics technologies developed within the COBRA Research Institute


Download our Brochure for a quick overview of our services



The video below shows some of our main foundry services to fabricate a typical nanophotonic device for NIR and ultrafast electro-optical operation


Please publish modules in offcanvas position.